Vacuum valve solutions for electron microscopy, metrology, inspection & defect review are usually tailor-made. Based on selected VAT basic technologies, we develop the optimal solution for the specific application area in terms of technical parameters such as conductance, tightness, drive, degree of outgassing and particle freedom, temperature resistance as well as space requirements. 

To learn more about how a VAT vacuum valve solution can help with specific valve tasks in electron microscopy, metrology, inspection & defect review, please select a product below.

04.2 - HV Transfer Valve with L-VAT
04.2 1 × 10-9 mbar to 1.2 bar (abs)

HV Transfer Valve with L-VAT

For Load Lock and Process Chamber Isolation
04.3 - HV Transfer Valve with L-MOTION
04.3 1 × 10-6 mbar to 1.1 bar (abs)

HV Transfer Valve with L-MOTION

Fast and Precise, Particularly Suited to Corrosive Processes
05.2 - HV Transfer Insert with L-VAT
05.2 1 × 10-9 mbar to 1.2 bar (abs)

HV Transfer Insert with L-VAT

For Load Lock and Process Chamber Isolation
05.3 - HV Transfer Valve Insert with L-MOTION
05.3

HV Transfer Valve Insert with L-MOTION

Fast and Precise, Particularly Suited to Corrosive Processes
07.0 - HV Transfer Door Insert with LINVAT
07.0 1 × 10-10 mbar to 1 bar (abs)

HV Transfer Door Insert with LINVAT

High Performance for EFEM and Load Lock Applications
10.8 - UHV Gate Valve
10.8 1 × 10-10 mbar to 1.2 bar (abs)

UHV Gate Valve

The Standard for UHV Isolation
12.1 - Gate Valve
12.1 1 × 10-7 mbar to 1.6 bar (abs)

Gate Valve

The Standard for Vacuum Isolation
14.0 - HV Gate Valve
14.0

HV Gate Valve

For Standard High Cycle Vacuum Isolation
15.2 - UHV Isolation Gate Valve
15.2 1 × 10-10 mbar to 1 bar (abs)

UHV Isolation Gate Valve

Exceptionally Low Shock and Particle Count
16.2 - HV Pendulum Isolation Valve
16.2 1 × 10-8 mbar to 1.2 bar (abs)

HV Pendulum Isolation Valve

The Standard for Isolation Requirements in Evaporator and Sputter Applications
20.3 - VATTERFLY Valve
20.3 1 × 10-8 mbar to 2 bar (abs)

VATTERFLY Valve

Reliable Isolation in Contaminating and Aggressive Vacuum Processes
21.0 - Butterfly Valve
21.0 DN 160

Butterfly Valve

Reliable Vacuum Isolation in a Compact Design
21.1 - Gas Dosing Valve
21.1 1 × 10-7 mbar to 4 bar (abs)

Gas Dosing Valve

Controlled, Reproducible Gas Flow for Vacuum Chambers
21.3 - Venting Valve
21.3 1 × 10-8 mbar to 1 bar (abs)

Venting Valve

Controlled Venting of Vacuum Systems
24.4 - Angle Valve
24.4 1 × 10-7 mbar to 5 bar (abs)

Angle Valve

Uncompromised Reliability for Large Volume Flows
24.5 - Inline Valve
24.5 1 × 10-7 mbar to 5 bar (abs)

Inline Valve

Uncompromised Reliability for Large Volume Flows
26.4 - HV Angle Valve
26.4

HV Angle Valve

Uncompromised Flexibility and Reliability
26.5 - HV Inline Valve
26.5 1 × 10-8 mbar to 5 bar (abs)

HV Inline Valve

Uncompromised Reliability
28.4 - UHV Angle Valve
28.4 5 × 10-10 mbar to 5 bar (abs)

UHV Angle Valve

Outstandingly Low Outgassing Performance
29.0 - HV Angle Valve with Soft-Pump Function
29.0 1 × 10-8 mbar to 1.2 bar (abs)

HV Angle Valve with Soft-Pump Function

Pumping, Venting Without Turbulence or Pressure Pulses (DN 25 - 80)
29.1 - HV Inline Valve with Soft-Pump Function
29.1 1 × 10-8 mbar to 1.2 bar (abs)

HV Inline Valve with Soft-Pump Function

Pumping, Venting Without Turbulence or Pressure Pulses
54.1 - UHV/XHV All-Metal Angle Valve - Easy Close
54.1 XHV to 2 bar (abs)

UHV/XHV All-Metal Angle Valve - Easy Close

For Extreme UHV Requirements
59.0 - UHV All-Metal Variable Leak Valve
59.0 UHV to 10 bar (abs)

UHV All-Metal Variable Leak Valve

For Extreme UHV Requirements
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