Semicon Japan 2025
Meet us from December 17 to 19 in Tokyo at Tokyo Big Sight, booth number W2263.
For optimal isolation and control of vacuum conditions in ion implanters, vacuum valves are needed that allow precise control while exhibiting physically neutral behavior in the process.
To find out more about how a VAT vacuum valve solution can help to address ion implantation process issues, please select from the products listed below.