Process Control & Isolation

High-precision control and isolation of vacuum and gas flows is essential in semiconductor manufacturing. In both upstream and downstream processes, all valve functions must guarantee precise repeatability over a high number of cycles. The result: precise volume flows over defined time intervals and consistent, reliable sealing. VAT control and isolation valves set the standard here.

The VAT vacuum valve portfolio for control and isolation in semiconductor manufacturing is always tailored to the special requirement. Depending on the requirement and area of application, the performance parameters of the individual series and valve technologies used are always adapted to the specific customer needs in each case. Key features include adaptable opening and closing cycles, stable adaptive sealing, advanced controller technology that allows high-precision control, particle activation and release prevention, and high manufacturing quality that guarantees defined, stable performance parameters for each valve manufactured.

To learn more about how a VAT vacuum valve solution can solve control and isolation challenges, select from the series listed below.