Process Control & Isolation
High-precision control and isolation of vacuum and gas flows is essential in semiconductor manufacturing. In both upstream and downstream processes, a...
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61.6 HV Butterfly Control and Isolation Valve
Fast, Precise Downstream Pressure Control and Isolation
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Outstanding Pressure Control and Isolation Under All Conditions
The 61.6 HV Control Butterfly Valve delivers outstanding pressure control and isolation performance. With its fast and precise acting motion controller (0.45 s) it’s the perfect solution for fine control and isolation in CVD processes. The plate acts as a throttling element and varies the conductance of the valve opening. The integrated pressure controller of the 61.6 calculates the required plate position to achieve the set pressure as fast as possible.
The 61.6 series isolation function is specially designed to avoid the characteristic higher seal wear of butterfly valves. With it out-of-center plate shaft and the special geometry of the valve body and seal seat, seal friction is minimized and the sealing performance is increased.
Already installed in thousands of demanding applications under various process conditions, the 61.6 series has proven its outstanding reliability. With a robust design and direct mounting option, as well as reduced and easy maintenance, the 61.6 series convinces in all aspects.
Various design options in body material, surface treatment, elastomers, flange connections, sealing material, special sizes as well as special control algorithms (adaptive, fix PI down-stream/soft-pump) simplify the integration of the 61.6 series into various vacuum applications.
61.6 HV Control Butterfly Valves are available in hard anodized aluminium or stainless steel with standard flange connectors in ISO-KF and ISO-F. Customer-specific flanges can be integrated, as well as special features like integrated heater with insulation. FFKM/FKM elastomers are available on request (FKM is standard).
Main features of the 61.6 HV Butterfly Control and Isolation Valve
Features:
- Excellent pressure control and isolation
- Very fast operation
- On-board software for local operation
- Reliable operation in harsh process conditions
Benefits:
- Better process controllability
- High uptime / unrestricted performance
- Low cost of operation
- Technical data
- Downloads
| Sizes |
DN 40 (1 ½"), DN 50 (2"), DN 63 (2 ½"), |
|
|---|---|---|
| Actuator | Integrated Controller with Stepper Motor, field oriented control (foc) | |
| Body Material | Hard anodized Aluminum or Stainless Steel | |
| Standard Flanges | ISO-KF, ISO-F | |
| Leak Rate: Valve Body | Hard anodized Aluminum Stainless Steel |
< 1 × 10-5 mbar ls-1 < 1 × 10-9 mbar ls-1 |
| Leak Rate: Valve Seat | Hard anodized Aluminum Stainless Steel |
< 1 × 10-4 mbar ls-1 < 1 × 10-9 mbar ls-1 |
| Pressure Range | Hard anodized Aluminum Stainless Steel |
< 1 × 10-6 mbar to 1.2 bar (abs) < 1 × 10-8 mbar to 1.2 bar (abs) |
| Cycles until First Service1) | Pressure Control Isolation |
2 million 250 000 (DN 40 - 50) 100 000 (DN 63 - 100) |
| Temperature | Valve Body Controller |
≤ 120 °C Max. 50°C (≤ 35 °C recommended) |
| Material | Alu Valve Body/Plate SS Valve Body/Shaft |
EN AW-6082 (3.2315) AISI 316L (1.4404 or 1.4435) |
| Seal | Plate Feedthrough |
FKM FKM |
| Feedthrough | Rotary Feedthrough | |
| Mounting Position | Valve Seat towards Chamber |
1) Maximum values depending on operating conditions and sealing materials
