Sputtering
PVD sputtering is a core process in display production. An important manufacturing step is, for example, backplane metallization, in which conductive...
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06.3 Large Transfer Valve / Insert with TWINVAT
High Performance for Display Production Systems - Atmospheric Pressure Version
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Reliable Under All Conditions
The 06.3 Large Transfer Valve / Insert with TWINVAT was developed for the special requirements of display production systems with a high cycle rate. Based on the concept of the 06.1 series, it combines, like the 06.1, an outstandingly fast opening and closing movement (≤ 2 s at 150 mm opening height) with high resistance to process-related deposits that would limit the performance of standard valves. Equipped with larger pressure elements, the 06.3 can withstand full differential pressure on the gate in opening direction. It is thus particularly suitable for OLED, PVD and load-lock applications.
The 06.3 is available in the "Ultra Clean" configuration for OLED and with a high-speed option for PVD and load-lock applications.
The 06.3 is designed for high uptime and reliable operation over a service life of at least one million cycles.
The TWINVAT technology used for the 06.3 is based on a modular platform concept. It provides a shock-free opening and closing motion. The smooth-running, double-acting TWINVAT mechanism ensures uniform seal pressure over the entire seal surface, minimizing seal wear and potential particle release. This also reduces to a relevant extent the total cost of FFKM seals over the life of the valve.
The 06.3 series is available as standard transfer valve with housing or as insert version to be mounted directly into the process chamber.
The 06.3 Large Transfer Valve / Insert with TWINVAT is tailored to the exact customer specification like all VAT transfer valve solutions. These customizations can include an additional process control unit, special surface treatments like hard anodized or nickel-plated aluminum, other sealing materials, vacuum gauges to detect the pressure in the valve body, bellows protected shaft feedthrough, RF & DC grounding options for valve and gate, lateral mounting position of the actuators and more.
Key features of the 06.3 Large Transfer Valve / Insert with TWINVAT
Features:
- Shock-free gate movement
- Special valve service function for gate seal changes
- Uniform pressure on the gate seal
Benefits:
- Low particle
- Low down time for maintenance
- Fast cycle times
- High uptime
Technical data
| Sizes | 100 x 1000 mm to 300 x 3800 mm (3.94" x 39.37" to 11.81" x 149.60") | ||
|---|---|---|---|
| Actuator | Pneumatic | Double acting with position indicator | |
| Body Material | Aluminum | ||
| Feedthrough | Shaft Feedthrough | ||
| Leak Rate | Valve Body | < 1 × 10-7 mbar ls-1 | |
| Valve Seat | < 1 × 10-7 mbar ls-1 | ||
| Differential Pressure | On the Gate | Valve: in closing direction only | ≤ 1 bar |
| Insert: in opening direction | ≤ 30 mbar | ||
| At Opening | ≤ 5 mbar | ||
| Cycles until first Service | 1 Million | ||
| Closing or opening time | < 2.5 s (with 150 mm opening height) | ||
| Temperature | Valve Body, Gate | ≤ 120 °C | |
| Actuator | ≤ 60 °C | ||
| Solenoid Valve | ≤ 50 °C | ||
| Material | Valve Body, Gate | EN AW-6082 (3.2315) or EN AW-5083 (3.3547) | |
| Actuator Shafts | AISI 316 (1.4401) | ||
| Bellows on pressure element | AISI 633 (AM 350) | ||
| Seal | Gate, flanges, feedthrough, actuator | FKM (Viton®) | |
| Pump / Vent Port | ISO-KF 40 | ||
| Mounting Position | Actuator Up or Down | ||
| Position Indicator | Voltage | 24 V DC PNP (NPN optional) | |
