Back to Product Configuration

Series

65.3 HV Pendulum Control Valve

  • 65.3 - 65340-PAGH
65.3 - 65340-PAGH

Series

65.3 HV Pendulum Control Valve

Article number
65340-PAGH

Optimized Downstream Pressure Control & Vacuum Isolation in SEMI & Display Systems

  • Technical data
  • Downloads
Size
DN 100 (4")
Flange
ISO-F
Material
Aluminum
Actuator
Stepper motor
Controller Configuration
Basic Version
Position Indication Signal
No
Solenoid
No
Pressure Min.
1 × 10-8 mbar
Pressure Max.
1.2 bar (abs)
Conductance
80 ls⁻¹
Differential Pressure on Plate
≤ 1 bar
Differential Pressure at opening
≤ 1 bar
Controller interface + sensors
RS232 interface / 2 sensors
Close to open
4 s
Open to close
3 s
Pressure control (throttling) fast speed
0.4 s
Pressure control (throttling) default speed
0.7 s
Weight
12.5 kg / 27.56 lbs
Max. temperature valve body
≤ 120 °C
Add-Ons for Your Product
Valve
Temperature Management
Actuator
Gate

65.3 HV Pendulum Control Valve 65340-PAGH Product Documentation

PDF 864.79 KB

65.3 HV Pendulum Control Valve 65340-PAGH Product Documentation

PDF 322.72 KB

65.3 HV Pendulum Control Valve 65340-PAGH CAD Files

ZIP 624.46 KB

Spare parts

Please specify your spare part need at the end of your selection process, on the next page.

Request for quote