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Series

65.3 HV Pendulum Control Valve

  • 65350-PAUX

Series

65.3 HV Pendulum Control Valve

Article number
65350-PAUX
1 × 10-8 mbar to 1 bar (abs)

Optimized Downstream Pressure Control & Vacuum Isolation in SEMI & Display Systems

  • Technical data
  • Downloads
Size
DN 320 (12")
Flange
ISO-F
Material
Aluminum
Actuator
Stepper motor
Position Indication Signal
No
Solenoid
No
Pressure Min.
1 × 10-8 mbar
Pressure Max.
1.2 bar (abs)
Differential Pressure on Plate
≤ 1 bar
Differential Pressure at opening
≤ 1 bar
Conductance
30000 ls⁻¹
Min. compressed air pressure
4 bar / 58 psi
Max. compressed air pressure
7 bar / 102 psi
Max. temperature valve body
≤ 120 °C
Open to close
5 s
Close to open
6 s
Pressure control (throttling) default speed
1.1 s
Pressure control (throttling) fast speed
0.6 s
Controller Configuration
PFO and VC master
Controller interface + sensors
EtherCAT / 2 sensors
Weight
48 kg / 105.82 lbs
Add-Ons for Your Product
Valve
Gate
Actuator
Temperature Management

65.3 HV Pendulum Control Valve 65350-PAUX 3D CAD File

ZIP 685 KB Download

65.3 HV Pendulum Control Valve 65350-PAUX 2D Dimension Drawing

PDF 822 KB Download

65.3 HV Pendulum Control Valve 65350-PAUX Product Datasheet

PDF 254 KB Download
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