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Series

65.3 HV Pendulum Control Valve

Series

65.3 HV Pendulum Control Valve

Article number

65350-JAAF

1 × 10^-8 mbar to 1 bar (abs)

Optimized Downstream Pressure Control & Vacuum Isolation in SEMI & Display Systems

Technical data
Downloads

Size

DN 320 (12")

Flange

JIS

Material

Aluminum

Actuator

Stepper motor

Position Indication Signal

Yes

Solenoid

Pressure Min.

1 × 10^-⁸ mbar

Pressure Max.

1.2 bar (abs)

Differential Pressure on Plate

≤ 1 bar

Differential Pressure at opening

≤ 1 bar

Conductance

30000 ls⁻¹

Min. compressed air pressure

4 bar / 58 psi

Max. compressed air pressure

7 bar / 102 psi

Max. temperature valve body

≤ 120 °C

Open to close

5 s

Close to open

6 s

Pressure control (throttling) default speed

1.1 s

Pressure control (throttling) fast speed

0.6 s

Controller Configuration

SPS

Controller interface + sensors

Profibus / 2 sensors

Weight

48 kg / 105.82 lbs

Add-Ons for Your Product

Valve

Customer specific flange

Alternative materials

Alternative surface finishing

Gate

Alternative sealing materials

Actuator

Ultra fast version

Temperature Management

Heater with insulation jacket

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Series