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Series

65.3 HV Pendulum Control Valve

  • 65344-PHUX

Series

65.3 HV Pendulum Control Valve

Article number
65344-PHUX
1 × 10-8 mbar to 1 bar (abs)

Optimized Downstream Pressure Control & Vacuum Isolation in SEMI & Display Systems

  • Technical data
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Size
DN 160 (6")
Flange
ISO-F
Material
Aluminum hard anodized
Actuator
Stepper motor
Position Indication Signal
No
Solenoid
No
Pressure Min.
1 × 10-6 mbar
Pressure Max.
1.2 bar (abs)
Differential Pressure on Plate
≤ 1 bar
Differential Pressure at opening
≤ 1 bar
Conductance
80 ls⁻¹
Min. compressed air pressure
4 bar / 58 psi
Max. compressed air pressure
7 bar / 102 psi
Max. temperature valve body
≤ 120 °C
Open to close
3 s
Close to open
4 s
Pressure control (throttling) default speed
0.8 s
Pressure control (throttling) fast speed
0.4 s
Controller Configuration
PFO and VC master
Controller interface + sensors
EtherCAT / 2 sensors
Weight
18 kg / 39.68 lbs
Add-Ons for Your Product
Valve
Gate
Actuator
Temperature Management

65.3 HV Pendulum Control Valve 65344-PHUX 3D CAD File

ZIP 656 KB Download

65.3 HV Pendulum Control Valve 65344-PHUX 2D Dimension Drawing

PDF 863 KB Download

65.3 HV Pendulum Control Valve 65344-PHUX Product Datasheet

PDF 254 KB Download
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