Back to Product Configuration

Series

65.3 HV Pendulum Control Valve

  • 65340-PAWX

Series

65.3 HV Pendulum Control Valve

Article number
65340-PAWX
1 × 10-8 mbar to 1 bar (abs)

Optimized Downstream Pressure Control & Vacuum Isolation in SEMI & Display Systems

  • Technical data
  • Downloads
Size
DN 100 (4")
Flange
ISO-F
Material
Aluminum
Actuator
Stepper motor
Position Indication Signal
No
Solenoid
No
Pressure Min.
1 × 10-8 mbar
Pressure Max.
1.2 bar (abs)
Differential Pressure on Plate
≤ 1 bar
Differential Pressure at opening
≤ 1 bar
Conductance
80 ls⁻¹
Max. temperature valve body
≤ 120 °C
Open to close
3 s
Close to open
4 s
Pressure control (throttling) default speed
0.7 s
Pressure control (throttling) fast speed
0.4 s
Controller Configuration
SPS, PFO and VC master
Controller interface + sensors
EtherCAT / 2 sensors
Weight
12.5 kg / 27.56 lbs
Add-Ons for Your Product
Valve
Gate
Actuator
Temperature Management

65.3 HV Pendulum Control Valve 65340-PAWX 3D CAD File

ZIP 624 KB Download

65.3 HV Pendulum Control Valve 65340-PAWX 2D Dimension Drawing

PDF 864 KB Download

65.3 HV Pendulum Control Valve 65340-PAWX Product Datasheet

PDF 254 KB Download
Scroll to:
Scroll to:

Spare Parts

Please specify your spare part need at the end of your selection process, on the next page.

Request for Quote