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Series

65.3 HV Pendulum Control Valve

  • 65340-PAUQ

Series

65.3 HV Pendulum Control Valve

Article number
65340-PAUQ
1 × 10-8 mbar to 1 bar (abs)

Optimized Downstream Pressure Control & Vacuum Isolation in SEMI & Display Systems

  • Technical data
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Size
DN 100 (4")
Flange
ISO-F
Material
Aluminum
Actuator
Stepper motor
Position Indication Signal
Position Indication Signal
No
Position Indication Signal
No
Solenoid
No
Pressure Min.
1 × 10-8 mbar
Pressure Max.
1.2 bar (abs)
Differential Pressure on Plate
≤ 1 bar
Differential Pressure at opening
≤ 1 bar
Conductance
80 ls⁻¹
Max. temperature valve body
≤ 120 °C
Open to close
3 s
Close to open
4 s
Pressure control (throttling) default speed
0.7 s
Pressure control (throttling) fast speed
0.4 s
Controller Configuration
PFO and VC master
Controller interface + sensors
DeviceNet / 2 sensors
Weight
12.5 kg / 27.56 lbs
Add-Ons for Your Product
Valve
Gate
Actuator
Temperature Management

65.3 HV Pendulum Control Valve 65340-PAUQ 3D CAD File

ZIP 624 KB Download

65.3 HV Pendulum Control Valve 65340-PAUQ 2D Dimension Drawing

PDF 864 KB Download

65.3 HV Pendulum Control Valve 65340-PAUQ Product Datasheet

PDF 254 KB Download
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