Vacuum valve solutions for electron microscopy, metrology, inspection & defect review are usually tailor-made. Based on selected VAT basic technologies, we develop the optimal solution for the specific application area in terms of technical parameters such as conductance, tightness, drive, degree of outgassing and particle freedom, temperature resistance as well as space requirements. 

To learn more about how a VAT vacuum valve solution can help with specific valve tasks in electron microscopy, metrology, inspection & defect review, please select a product below.

Relevant Series

HV Transfer Valve with L-VAT

04.2

1 × 10-9 mbar to 1.2 bar (abs)

HV Transfer Valve with L-VAT

For Load Lock and Process Chamber Isolation

HV Transfer Valve with L-MOTION

04.3

1 × 10-6 mbar to 1.1 bar (abs)

HV Transfer Valve with L-MOTION

Fast and Precise, Particularly Suited to Corrosive Processes

HV Transfer Insert with L-VAT

05.2

1 × 10-9 mbar to 1.2 bar (abs)

HV Transfer Insert with L-VAT

For Load Lock and Process Chamber Isolation

HV Transfer Valve Insert with L-MOTION

05.3

1 × 10-9 mbar to 1.1 bar (abs)

HV Transfer Valve Insert with L-MOTION

Fast and Precise, Particularly Suited to Corrosive Processes

HV Transfer Door Insert with LINVAT

07.0

HV Transfer Door Insert with LINVAT

High Performance for EFEM and Load Lock Applications

UHV Gate Valve

10.8

1 × 10-10 mbar to 1.2 bar (abs)

UHV Gate Valve

The Standard for UHV Isolation

Gate Valve

12.1

1 × 10-7 mbar to 1.6 bar (abs)

Gate Valve

The Standard for Vacuum Isolation

HV Gate Valve

14.0

HV Gate Valve

For Standard High Cycle Vacuum Isolation

UHV Isolation Gate Valve

15.2

1 × 10-10 mbar to 1 bar (abs)

UHV Isolation Gate Valve

Exceptionally Low Shock and Particle Count

HV Pendulum Isolation Valve

16.2

1 × 10-8 mbar to 1.2 bar (abs)

HV Pendulum Isolation Valve

The Standard for Isolation Requirements in Evaporator and Sputter Applications

VATTERFLY Valve

20.3

1 × 10-8 mbar to 2 bar (abs)

VATTERFLY Valve

Reliable Isolation in Contaminating and Aggressive Vacuum Processes

Butterfly Valve

21.0

1 × 10-8 mbar to 1.3 bar (abs)

Butterfly Valve

Reliable Vacuum Isolation in a Compact Design

Gas Dosing Valve

21.1

1 × 10-7 mbar to 4 bar (abs)

Gas Dosing Valve

Controlled, Reproducible Gas Flow for Vacuum Chambers

Venting Valve

21.3

1 × 10-8 mbar to 1 bar (abs)

Venting Valve

Controlled Venting of Vacuum Systems

Angle Valve

24.4

1 × 10-7 mbar to 5 bar (abs)

Angle Valve

Uncompromised Reliability for Large Volume Flows

Inline Valve

24.5

1 × 10-7 mbar to 5 bar (abs)

Inline Valve

Uncompromised Reliability for Large Volume Flows

HV Angle Valve

26.4

1 × 10-8 mbar to 2 bar (abs)

HV Angle Valve

Uncompromised Flexibility and Reliability

HV Inline Valve

26.5

1 × 10-8 mbar to 5 bar (abs)

HV Inline Valve

Uncompromised Reliability

UHV Angle Valve

28.4

5 × 10-10 mbar to 5 bar (abs)

UHV Angle Valve

Outstandingly Low Outgassing Performance

HV Angle Valve with Soft-Pump Function

29.0

1 × 10-8 mbar to 1.2 bar (abs)

HV Angle Valve with Soft-Pump Function

Pumping, Venting Without Turbulence or Pressure Pulses (DN 25 - 80)

HV Inline Valve with Soft-Pump Function

29.1

1 × 10-8 mbar to 1.2 bar (abs)

HV Inline Valve with Soft-Pump Function

Pumping, Venting Without Turbulence or Pressure Pulses

UHV/XHV All-Metal Angle Valve - Easy Close

54.1

XHV to 2 bar (abs)

UHV/XHV All-Metal Angle Valve - Easy Close

For Extreme UHV Requirements

UHV All-Metal Variable Leak Valve

59.0

UHV to 10 bar (abs)

UHV All-Metal Variable Leak Valve

For Extreme UHV Requirements

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